We are able to offer a unique range of equipment, support services and technical expertise to meet application needs in the manufacture of microelectronics devices, including silicon and compound semiconductors. Our main vacuum pump manufacturer Edwards continues to innovate leading technology solutions to improve process uptime, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of:

· Lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water),

. Reduced environmental emissions (noise, vibration, sub-fab particles, waste gas and waste water),

· Extended product lifetimes and reduction in on-going service costs.

Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, Edwards’ systems are designed to meet the specific requirements of existing and developing processes. A variety of systems, such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise performance across the range of applications, from light duty to the heaviest duty processes.